Wafer cleaning is an indispensable and critical process in semiconductor manufacturing, directly influencing product yield and process stability. During the cleaning process, chemical solvents and pure water are used to remove photoresists, organic substances, metal residues, particles, and other contaminants, followed by polishing to ensure a clean and smooth wafer surface, laying the foundation for subsequent processes. Throughout the IC production line, wafer cleaning is required before and after almost every step, accounting for approximately one-third of the entire production cycle. Due to its irreplaceable role in enhancing wafer performance, reducing process defects, and eliminating contamination, manufacturers in the highly competitive semiconductor industry have stringent requirements for the precision, efficiency, and optimization of the cleaning process.
In the wafer cleaning process, after wafers are removed from the carrier, mechanical clamping devices combined with alignment algorithms are typically used to precisely center each wafer, ensuring accuracy in subsequent cleaning steps. However, centering operations may lead to efficiency losses, such as additional time spent on re-centering. To address these challenges, the integration of machine vision and motion control systems has become a critical strategy for improving cleaning efficiency.
Machine vision systems can detect wafer offset or warpage in real time, providing accurate data to assist in centering and cleaning operations. Meanwhile, vision systems can optimize cleaning parameters for motion control systems through data analysis, ensuring the cleaning process is uniform and precise, avoiding overprocessing or wafer damage. This not only significantly improves cleaning efficiency and accuracy but also meets the stringent demands of modern semiconductor manufacturing for high efficiency and precision. Particularly in removing microscopic particles and maintaining wafer surface integrity, these systems provide manufacturers with a more robust and reliable solution.
The PSYS-508-Q670 supports 14th/13th/12th Gen Intel® Core™ processors and features PCIe Gen5 and M.2 expansion slots, allowing integration of image capture cards, RTX 4070 GPUs, or Hailo AI accelerators. Its machine vision system enables real-time detection of wafer offset and warpage, providing precise data for wafer alignment and cleaning, significantly improving efficiency. Paired with motion control cards, the system optimizes cleaning parameters, ensuring uniform and precise cleaning while preventing over-processing or wafer damage. With up to 128GB DDR5 memory, it supports high-bandwidth data transfer, handling multiple high-resolution image streams and real-time inference.
The PSYS-508 includes seven SATA ports with RAID support for large data storage and fast access, making it ideal for stable, long-term vision system operation. Equipped with 2.5GbE interfaces, USB 3.2 Gen 2 ports, and serial connections, it supports subsystems like visual inspection and flow control, enabling real-time data exchange and feedback. Its HDMI, DisplayPort, and VGA outputs provide real-time monitoring and visualization, while the 4U rackmount design and 80 Plus Gold-certified power supply ensure stability during high-load operations, meeting the demands of modern semiconductor manufacturing.
As an Intel Partner Alliance Gold Member and a leader in industrial computer solutions, Portwell delivers innovative embedded systems through comprehensive DMS and EMS services, offering tailored solutions from design to production to meet diverse market needs.
Our global network ensures real-time communication, accelerating testing, validation, and development efficiency. We provide local communication, FAE support, project consultation, after-sales service, and issue resolution, backed by efficient logistics and localized support. Portwell’s RPET platform integrates system monitoring, equipment control, and remote management, simplifying IoT solution design while ensuring stable operations. With value-driven products and exceptional services, we help customers enhance competitiveness and achieve sustainable success.
